DI/DU Piezo

The DI/DU series utilize either a Piezo sensor, or a miniaturized capacitance cell. This enables measurement from 2000 to 1mbar (1500 to 0.75 torr) for the Piezo based vacuum sensors and 200 to 0.1 mbar (150 to 0.075torr) for the capacitive based vacuum sensors. Whatever sensor type that you use, there is a choice of FPM or EDPM sealing to make sure that you use a sealing technology ensuring the longest life in your process. The final decision point is whether you want a 0-10 V analogue output (DU series) or a 4-20mA output (DI series). 4-20mA outputs are typically used when there is a risk of electrical interference, or a risk of signal drop over long cables. We also offer differential Piezo sensors (-1000 to +1000mbar) enabling measurement of pressure relative to atmospheric pressure, useful for when monitoring load lock style chambers.