Turbomolecular pumps
Description
Turbomolecular pumps, magnetically levitated
Your expectations:
■ Clean high and ultra-high vacuum generation
■ Suitable for industrial use, like PVD and coating processes, display and glass coating
■ Insensitivity to particles or deposits
■ Low maintenance requirements
Our solutions:
■ Pumping speed up to 2,200 l/s
■ High pumping speed and high compression ratios for all gases
■ Holweck stage incorporated
■ Resistant to particles and deposits
■ Insensitive to shock-venting
■ Monitoring and self-protection functions
■ Maintenance-free in most applications
